Introduction to Microfabrication Год выпуска: 2010Автор: Sami FranssilaИздательство: Страниц: 584ISBN: 9780470749838Описание The first edition of this book published in 2004 and has proved to be both a valuable textbook and a handy desk reference. This new edition continues to provide students with an accessible guide to an important field. Fully updated, it has five new chapters that incorporate the recent developments in the field.
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