Design, Analysis and Simulation of Tunable MEMS Capacitor Год выпуска: 2013Автор: K. Srinivasa Rao,Y. Srinivas and P. SairamИздательство: LAP Lambert Academic PublishingСтраниц: 108ISBN: 9783659331961Описание This BOOK covers all relevant topics in MEMS and is design to cater to the needs of all branches of engineering students. Written in lucid style, this book assimilates the best practice of pedagogy, dealing at length with various topics such MEMS, MEMS Applications and its importance in Engineering Community. Sailent Features: 1. Introduction to MEMS 2. Introduction to Fabrication Technology 3. Introduction to Comsol 4. Introduction to Capacitors 5. Tunable MEMS Capacitor 6. Design Procedure 7. Simulation of tunable capacitor in Micro scale
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