Год выпуска: 2012 Автор: Satyam Gurve Издательство: LAP Lambert Academic Publishing Страниц: 112 ISBN: 9783659160370
Описание
Early days creative minds invented some extra ordinary device but in big size nowadays human have ability to make physically small and intelligent object, which has ability to make functions that cannot be realized with traditional technologies having arisen out of the silicon IC micro fabrication technology.MEMS i.e. Micro-Electro-Mechnical-System.this is a small world technology with great potential.In most general MEMS include mechanical micro-structure, micro-sensor, micro actuator, microelectronics all integrated. Using this technology we can integrated all big size equipment with great efficiency of work and relatively low cost as compare to traditional equipment.It is found in nearly every field from Medical to electronics,from communication to automobile and so on low cost,great efficiency,small size are tha features of MEMS.
