Год выпуска: 2011 Автор: Ali Atta Издательство: LAP Lambert Academic Publishing Страниц: 180 ISBN: 9783845474984
Описание
In this work, intensive studies have been done to produce plasma beams that could be successfully used in a variety of applications. This thesis covers the design, construction and operation of a plasma beam. On the other side, some applications of the extracted beam with target materials were studied. To determine the plasma parameters, a single electrostatic probe with its electrical circuit are constructed and attached to the system. Accordingly, the argon plasma was obtained and its characteristics have been measured, for the sake to find out the most suitable ones to run successfully the possible aimed applications (cleaning, sputtering, coating and polymerization). This was made by plotting the plasma radial profile, the I-V characteristics and calculating the electron temperature and density at different pressures and electrodes`enter-spacings.
