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Hafnium Oxide And Hafnium Silicate For High-k Application



Год выпуска: 2010
Автор: Harish Bhandari
Издательство: LAP Lambert Academic Publishing
Страниц: 232
ISBN: 9783838333885
Описание
Novel materials with high-dielectric(k) constants are rapidly gaining attention for their application as gate insulator for future MOS transistors. This book provides the basic principles underlying chemical vapor deposition (CVD) of hafnium oxide and hafnium silicate thin films for high-k application. In addition to the deposition fundamentals, the discussions in the book provide valuable insights to various chemical and physical characterization techniques that can be applied to thin films in general. This easy-to-understand and well- illustrated text is designed for both beginners as well as advanced researchers with a good introduction to the subject of high-k thin films.


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Маша
Юля, Добрый день! Вы сопровождали мне курсовую, все от нее в восторге. Сейчас мне очень нужен реферат. Тема не сложная, но нет времени. Я отправила заявку, очень бы хотелось чтобы по возможности его консультировали Вы.