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Theoretical Study in Doping Process: Ion Implantation and Diffusion



Год выпуска: 2012
Автор: Fatima Al-Saeed,Shaker I. Easa and Jenan M. Al-Mukh
Издательство: LAP Lambert Academic Publishing
Страниц: 152
ISBN: 9783659170065
Описание
Ion implantation and diffusion which occur during irradiation are investigated through out series of related processes. In our study, the whole process will be viewed as a two-step process. The first includes the implantation process. The equation of motion for ion implantation is considered as a modified form of Fick's law, which solved analytically taking the sputtering process into account. The second step i.e. the step of ion-redistribution through out diffusion is studied keeping in mind that the total number of impurities is conserved in the step of injection and diffusion. The case of diffusion-concentration dependence and the suitable equation for thermal diffusion is studied too. The steady state situation is studied extendedly. The diffusion in multilayer structure and a useful introduction about hererostructures is given with important related effects are presented. Extended theoretical treatment concerned with the extension to multilayer structures is presented. ...


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