Год выпуска: 2010 Автор: Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka Издательство: Страниц: 672 ISBN: 0815515944
Описание
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.Key topics covered include:Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in materials characterizationModeling in MEMSMeasuring MEMSMicromachining technologies in MEMSEncapsulation of MEMS componentsEmerging process technologies, including ALD and porous siliconWritten by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland.Markku Tilli is...