UV and VUV Excilamps
Год выпуска: 2012 Автор: Eduard Sosnin,Victor Tarasenko and Mikhail Lomaev Издательство: LAP Lambert Academic Publishing Страниц: 320 ISBN: 9783659217562 Описание The book provides a review of research, development, and application of modern gas discharge sources of spontaneous radiation ? excimer and exciplex lamps (excilamps). The physical processes associated with excimer and exciplex radiation and the techniques used for excilamp excitation are described. The book will be of interest to scientists and engineers involved with ultraviolet and vacuum ultraviolet sources and to students and lecturers of universities.
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